品牌： Entegris
| PART NUMBER | PRODUCT TYPE | MAXIMUM FLOW RATE | FITTING SIZE AND TYPE | LENGTH |
|---|---|---|---|---|
| WGFG02PR1 | Wafergard® SG F Mini XL gas filter | 120 slpm | 1/4" gasket seal (VCR® compatible) | 127 mm (5.00") |
| WGFG02PS1 | Wafergard® SG F Mini XL gas filter | 120 slpm | 1/4" compression seal (Swagelok® compatible) | 115.5 mm (4.55") |
| WGFG32PR1 | Wafergard® SG F Mini XL gas filter | 120 slpm | 1/2" gasket seal (VCR® compatible) | 133.5 mm (5.26") |
| WGFG32PS1 | Wafergard® SG F Mini XL gas filter | 120 slpm | 3/8" compression seal (Swagelok® compatible) | 119.3 mm (4.70") |
| WGFG50PR1 | Wafergard® SG F Mini XL gas filter | 120 slpm | 1/2" gasket seal (VCR® compatible) | 127 mm (5.00") |
| WGFGMBPRF2 | Wafergard® SG Max gas filter | 500 slpm | 1/4" gasket seal (compatible with VCR fitting) male inlet/ female outlet | 141.2 mm (5.6") |
| WGFGMBRR2 | Wafergard® SG Max gas filter | 500 slpm | 1/4" gasket seal (VCR® compatible) | 127 mm (5.00") |
| WGFGMBRR4 | Wafergard® SG Max gas filter | 1000 slpm | 1/2" gasket seal (VCR® compatible) | 127 mm (5.00") |
| WGFGMBSS2 | Wafergard® SG Max gas filter | 500 slpm | 1/4" compression seal (Swagelok® compatible) | 112.7 mm (4.44") |
| WGFGMBSS3 | Wafergard® SG Max gas filter | 1000 slpm | 3/8" compression seal (Swagelok® compatible) | 117.9 mm (4.64") |
| WGFGMBSS4 | Wafergard® SG Max gas filter | 1000 slpm | 1/2" compression seal (Swagelok® compatible) | 118.7 mm (4.67") |
| WGFGT1PR1 | Wafergard® SG F Micro gas filter | 60 slpm | 1/4" gasket seal (VCR® compatible) | 84.1 mm (3.31") |
| WGFGT1PS1 | Wafergard® SG F Micro gas filter | 60 slpm | 1/4" compression seal (Swagelok® compatible) | 73.7 mm (2.90") |
| YY5001HR1 | Wafergard® SG PA gas filter | 60 slpm | 1/4" gasket seal (VCR® compatible) | 84.1 mm (3.31") |
| YY5001HS1 | Wafergard® SG PA gas filter | 60 slpm | 1/4" compression seal (Swagelok® compatible) | 73.7 mm (2.90") |
| YY5002PR1 | Wafergard® SG PAL gas filters | 120 slpm | 1/4" gasket seal (VCR® compatible) | 127.0 mm (5.00") |
| YY5002PS1 | Wafergard® SG PAL gas filters | 120 slpm | 1/4" compression seal (Swagelok® compatible) | 115.5 mm (4.55") |
| YY5032PR1 | Wafergard® SG PAL gas filters | 200 slpm | 3/8" Gasket seal (VCR® compatible) | 133.5 mm (5.26") |
| YY5032PS1 | Wafergard® SG PAL gas filters | 200 slpm | 3/8" compression seal (Swagelok® compatible) | 119.3 mm (4.70") |
苏ICP备14000045号-6