

品牌: ENTEGRIS
应特格ENTEGRIS GPU气体净化器,GPUS700FYX04R02CA现货11台
应特格ENTEGRIS GPU气体净化器,GPUS700FYX04R02CA现货11台
应特格ENTEGRIS GPU气体净化器,GPUS700FYX04R02CA现货11台
GPU系列净化器旨在提高工艺气体的一致性、使用寿命和出口纯度。
OPERATING SPECIFICATIONS
—
Model
Maximum
flow rate
Lifetime is 1
year at this
flow rate,
with 1 ppm
moisture and
1 ppm oxygen
Maximum
operating
pressure –
purifier only
Maximum
operating
pressure –
purifier with
options
Pressure drop,
with 20 μm
particle filter*
Pressure
drop, with
0.0015 μm
particle filter*
GPU 200 20 slpm 1.4 slpm 800 psig 250 psig – 0.7 psid
GPU 300 50 slpm 2.1 slpm 800 psig 250 psig – 1.3 psid
GPU 500 75 slpm 4.3 slpm 600 psig 250 psig – 1.3 psid
GPU 700 120 slpm 6.0 slpm 600 psig 250 psig – 1.8 psid
GPU 2500 4R 300 slpm 22.5 slpm 505 psig 250 psig – 5.0 psid
GPU 2500 8R 500 slpm 22.5 slpm 505 psig 250 psig – 5.6 psid
GPU 3000 500 slpm 26.3 slpm 505 psig 250 psig – 5.6 psid
GPU 5000 500 slpm 42.0 slpm 505 psig 250 psig – 7.0 psid
GPU 10M 8R 1,000 slpm 88.0 slpm 370 psig 250 psig – 5.8 psid
GPU 10M 12R 1,000 slpm 88.0 slpm 370 psig 250 psig – 8.0 psid
GPU 13M 12R 2,000 slpm 107.0 slpm 370 psig 250 psig 2.0 psid –
GPU 13M 16R 2,500 slpm 107.0 slpm 370 psig 250 psig 3.0 psid –
GPU 17M 12R 2,000 slpm 132.0 slpm 370 psig 250 psig 2.0 psid –
GPU 17M 16R 2,500 slpm 132.0 slpm 370 psig 250 psig 3.0 psid –
GPU 20M 12R 2,000 slpm 160.0 slpm 370 psig 250 psig – 19.0 psid
GPU 20M 16R 2,500 slpm 160.0 slpm 370 psig 250 psig – 19.0 psid
*Purifier only at maximum flow rating with 90 psig inlet pressure
4
FACILITY SPECIFICATIONS
—
GPU model
Connection
size (VCR)
Inlet/outlet
connection type
(VCR)
Outside
diameter (OD)
Overall length
(OAL)
Approximate
weight
GPU 200 1/4" Male/male 50.8 mm (2.0") 157 mm (6.2") 0.9 kg (2.0 lbs)
GPU 300 1/4" Male/male 50.8 mm (2.0") 208 mm (8.2") 1.1 kg (2.5 lbs)
GPU 500 1/4" Male/male 76.2 mm (3.0") 201 mm (7.9") 1.8 kg (4.0 lbs)
GPU 700 1/4" Male/male 76.2 mm (3.0") 254 mm (10.0") 2.5 kg (5.5 lbs)
GPU 2500 4R 1/4" Male/male 101.6 mm (4.0") 439 mm (17.3") 6.8 kg (15 lbs)
GPU 2500 8R 1/2" Male/male 101.6 mm (4.0") 445 mm (17.5") 6.8 kg (15 lbs)
GPU 3000 1/2" Male/male 101.6 mm (4.0") 508 mm (20.0") 7.3 kg (16 lbs)
GPU 5000 1/2" Male/male 101.6 mm (4.0") 785 mm (30.9") 10.0 kg (22 lbs)
GPU 10M 8R 1/2" Male/male 152.4 mm (6.0") 737 mm (29.0") 20 kg (44 lbs)
GPU 10M 12R 3/4" Male/male 152.4 mm (6.0") 749 mm (29.5") 21.8 kg (48 lbs)
GPU 13M 12R 3/4" Male/male 152.4 mm (6.0") 892 mm (35.1") 24.9 kg (55 lbs)
GPU 13M 16R 1" Male/male 152.4 mm (6.0") 899 mm (35.4") 24.9 kg (55 lbs)
GPU 17M 12R 3/4" Male/male 152.4 mm (6.0") 1085 mm (42.7") 29.5 kg (65 lbs)
GPU 17M 16R 1" Male/male 152.4 mm (6.0") 1090 mm (42.9") 29.5 kg (65 lbs)
GPU 20M 12R 3/4" Male/male 152.4 mm (6.0") 1290 mm (50.8") 34 kg (75 lbs)
GPU 20M 16R 1" Male/male 152.4 mm (6.0") 1296 mm (51.0") 34 kg (75 lbs)
5
FACILITY SPECIFICATIONS, PURIFIERS WITH ISOLATION VALVES
—
GPU model
Connection
size (VCR)
Inlet/outlet
connection type
(VCR)
Outside
diameter (OD)
Overall length
(OAL) with valves
Approximate
weight with valves
GPU 200 1/4" Female/female 50.8 mm (2.0") 307 mm (12.1") 1.7 kg (3.7 lbs)
GPU 300 1/4" Female/female 50.8 mm (2.0") 358 mm (14.1") 1.8 kg (3.8 lbs)
GPU 300 (GC 300) 1/4" Female/male 83.8 mm (3.3") 401.3 mm (15.8") 2.3 kg (5.1 lbs)
GPU 500 1/4" Female/female 76.2 mm (3.0") 351 mm (13.8") 2.7 kg (6.0 lbs)
GPU 700 1/4" Female/female 76.2 mm (3.0") 404 mm (15.9") 4.4 kg (9.6 lbs)
GPU 2500 4R 1/4" Female/female 101.6 mm (4.0") 592 mm (23.3") 6.8 kg (15 lbs)
GPU 2500 8R 1/2" Female/female 101.6 mm (4.0") 714 mm (28.1") 8.0 kg (17.7 lbs)
GPU 3000 1/2" Female/female 101.6 mm (4.0") 777 mm (30.6") 8.5 kg (18.7 lbs)
GPU 5000 1/2" Female/female 101.6 mm (4.0") 1054 mm (41.5") 12.5 kg (27.6 lbs)
GPU 10M 8R 1/2" Female/male 152.4 mm (6.0") 970 mm (38.2") 22.5 kg (49.6 lbs)
GPU 10M 12R 3/4" Female/female 152.4 mm (6.0") 1125 mm (44.3") 24.9 kg (55.0 lbs)
GPU 13M 12R 3/4" Female/female 152.4 mm (6.0") 1270 mm (50.0") 28.1 kg (62.0 lbs)
GPU 13M 16R 1" Female/female 152.4 mm (6.0") 1308 mm (51.5") 29.5 kg (65.0 lbs)
GPU 17M 12R 3/4" Female/female 152.4 mm (6.0") 1461 mm (57.5") 32.7 kg (72.0 lbs)
GPU 17M 16R 1" Female/female 152.4 mm (6.0") 1499 mm (59.0") 34.0 kg (75.0 lbs)
GPU 20M 12R 3/4" Female/female 152.4 mm (6.0") 1666 mm (65.6") 37.2 kg (82.0 lbs)
GPU 20M 16R 1" Female/female 152.4 mm (6.0") 1705 mm (67.1") 38.6 kg (85.0 lbs)

ENTEGRIS WGFGMBRR4 过滤器
ENTEGRIS WGPM0GGG2 过滤器
ENTEGRIS WGMXMSRR4 过滤器
ENTEGRIS WGMXMSRR2
ENTEGRIS WG3NSMSL2 气体过滤器
ENTEGRIS WG3NSMSL2 气体过滤器
ENTEGRIS WG3NSMSL2 气体过滤器
ENTEGRIS CBUG0S0S1 过滤器
ENTEGRIS WG3NS8RR2
ENTEGRIS WGMXMPSS3
ENTEGRIS WG2F02RR4
Entegris WGFG02PS1 过滤器
ENTEGRIS WGFGMBRR4 过滤器
ENTEGRIS WGFGT1PR1 过滤器
ENTEGRIS WGPMOGGT2 过滤器
ENTEGRIS WGPMOGGT2 过滤器
ENTEGRIS WGPMOGGT2 过滤器
ENTEGRIS WGPMOGGT2 过滤器
ENTEGRIS WGPM0GGG2 过滤器
Entegris WG2FT1SS2 过滤器
ENTEGRIS WGMXMSRR4 过滤器
ENTEGRIS WGMXMSRR2
ENTEGRIS WGMXMSRR2(无包装)
ENTEGRIS WGFG01DS0 过滤器
ENTEGRIS LGMXFPRR4
ENTEGRIS LGMXFPRR4
ENTEGRIS WG3NS8RR2
ENTEGRIS WGMXMBSS2 过滤器
ENTEGRIS WGMXMBSS2 过滤器
ENTEGRIS WGPM0GGT2 过滤器
ENTEGRIS WGPM0GGT2 过滤器
ENTEGRIS WGPM0GGT2 过滤器
ENTEGRIS WGPM0GGT2 过滤器
ENTEGRIS WGPM0GGT2 过滤器
ENTEGRIS SVEG01P01
ENTEGRIS SVTG01TQ1
ENTEGRIS SVTG02TQ1
ENTEGRIS LGMXFPSS3
ENTEGRIS WGMXMPRR2
Entegris WG3D40DR2 过滤器
Entegris WG3D40DR2 过滤器
ENTEGRIS WG2F40RR3
ENTEGRIS WGMXMBSS4 过滤器
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