应特格ENTEGRIS纯化器，GPUS5000FHX08R00CA，百万现货在库！

应特格ENTEGRIS纯化器，GPUS5000FHX08R00CA，百万现货在库！

应特格ENTEGRIS纯化器，GPUS5000FHX08R00CA，百万现货在库！

GateKeeper GPU Gas Purifiers
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GateKeeper GPU series of purifiers were designed to improve process gas consistency, lifetime and outlet purity.
Purity to ppt levels
Wide range of gas compatibility, including corrosive gases such as Cl2, HBr, HCl, CF4, SO2, SF6
Low pressure drop across the purifier
CE certified to the pressure equipment directive PED and manufactured in an ISO 9001-2000 facility
Regenerable – eliminates disposal issues and costs
Long lifetime – improved cost of ownership
Use ambient temperature purification 

  

 

应特格GateKeeper GPU 气体净化器

GateKeeper GPU系列净化器旨在提高工艺气体的一致性、使用寿命和出口纯度。
纯度至 ppt 水平
广泛的气体兼容性，包括腐蚀性气体如Cl2、HBr、HCl、CF4、SO2、SF6
净化器压降低
CE认证符合压力设备指令PED，并在ISO 9001-2000设施中制造
可再生 – 消除处理问题和成本
长寿命 - 改进的拥有成本
使用环境温度净化 
应用程序
GateKeeper GPU 气体净化器 应用
批量气体交付
光刻术
外延生长
干法刻蚀
晶圆生长
沉积
  

OPERATING SPECIFICATIONS

GPU 15 0.5 slpm 0.3 slpm 2,000 psig 250 psig – 0.1 psid

GPU 35 1 slpm 1.0 slpm 1,400 psig 250 psig – 0.3 psid

GPU 70 5 slpm 1.6 slpm 1,400 psig 250 psig – 0.5 psid

GPU 80 10 slpm 1.9 slpm 1,400 psig 250 psig – 1.0 psid

GPU 100 20 slpm 2.6 slpm 1,000 psig 250 psig – 16.7 psid

GPU 200 20 slpm 4.2 slpm 800 psig 250 psig – 0.7 psid

GPU 300 50 slpm 6.3 slpm 800 psig 250 psig – 1.3 psid

GPU 500 75 slpm 13.0 slpm 600 psig 250 psig – 1.3 psid

GPU 700 120 slpm 18.0 slpm 600 psig 250 psig – 1.8 psid

GPU 2500 4R 300 slpm 65.0 slpm 505 psig 250 psig – 5.0 psid

GPU 2500 8R 500 slpm 65.0 slpm 505 psig 250 psig – 5.6 psid

GPU 3000 500 slpm 75.0 slpm 505 psig 250 psig – 5.6 psid

GPU 5000 500 slpm 125.0 slpm 505 psig 250 psig – 7.0 psid

GPU 10M 8R 1,000 slpm 260.0 slpm 370 psig 250 psig – 5.8 psid

GPU 10M 12R 1,000 slpm 260.0 slpm 370 psig 250 psig – 8.0 psid

GPU 13M 12R 2,000 slpm 320.0 slpm 370 psig 250 psig 2.0 psid –

GPU 13M 16R 2,500 slpm 320.0 slpm 370 psig 250 psig 3.0 psid –

GPU 17M 12R 2,000 slpm 400.0 slpm 370 psig 250 psig 2.0 psid –

GPU 17M 16R 2,500 slpm 400.0 slpm 370 psig 250 psig 3.0 psid –

GPU 20M 12R 2,000 slpm 480.0 slpm 370 psig 250 psig – 19.0 psid

GPU 20M 16R 2,500 slpm 480.0 slpm 370 psig 250 psig – 19.0 psid

*Purifier only at maximum flow rating with 90 psig inlet pressure

FACILITY SPECIFICATIONS

GPU 15 1/4" Male/male 25.4 mm (1.0") 84 mm (3.3") 0.2 kg (0.4 lbs)

GPU 35 1/4" Male/male 38.1 mm (1.5") 84 mm (3.3") 0.3 kg (0.7 lbs)

GPU 70 1/4" Male/male 38.1 mm (1.5") 114 mm (4.5") 0.3 kg (0.7 lbs)

GPU 80 1/4" Male/male 38.1 mm (1.5") 127 mm (5.0") 0.3 kg (0.7 lbs)

GPU 100 1/4” Male/male N/A 84 mm (3.3") 0.9 kg (2.0 lbs)

GPU 200 1/4" Male/male 50.8 mm (2.0") 157 mm (6.2") 0.9 kg (2.0 lbs)

GPU 300 1/4" Male/male 50.8 mm (2.0") 208 mm (8.2") 1.1 kg (2.5 lbs)

GPU 500 1/4" Male/male 76.2 mm (3.0") 201 mm (7.9") 1.8 kg (4.0 lbs)

GPU 700 1/4" Male/male 76.2 mm (3.0") 254 mm (10.0") 2.5 kg (5.5 lbs)

GPU 2500 4R 1/4" Male/male 101.6 mm (4.0") 439 mm (17.3") 6.8 kg (15 lbs)

GPU 2500 8R 1/2" Male/male 101.6 mm (4.0") 445 mm (17.5") 6.8 kg (15 lbs)

GPU 3000 1/2" Male/male 101.6 mm (4.0") 508 mm (20.0") 7.3 kg (16 lbs)

GPU 5000 1/2" Male/male 101.6 mm (4.0") 785 mm (30.9") 10.0 kg (22 lbs)

GPU 10M 8R 1/2" Male/male 152.4 mm (6.0") 737 mm (29.0") 20 kg (44 lbs)

GPU 10M 12R 3/4" Male/male 152.4 mm (6.0") 749 mm (29.5") 21.8 kg (48 lbs)

GPU 13M 12R 3/4" Male/male 152.4 mm (6.0") 892 mm (35.1") 24.9 kg (55 lbs)

GPU 13M 16R 1" Male/male 152.4 mm (6.0") 899 mm (35.4") 24.9 kg (55 lbs)

GPU 17M 12R 3/4" Male/male 152.4 mm (6.0") 1085 mm (42.7") 29.5 kg (65 lbs)

GPU 17M 16R 1" Male/male 152.4 mm (6.0") 1090 mm (42.9") 29.5 kg (65 lbs)

GPU 20M 12R 3/4" Male/male 152.4 mm (6.0") 1290 mm (50.8") 34 kg (75 lbs)

GPU 20M 16R 1" Male/male 152.4 mm (6.0") 1296 mm (51.0") 34 kg (75 lbs)

GPU 15 1/4" Female/female 25.4 mm (1.0") 234 mm (9.2") 1.1 kg (2.4 lbs)

GPU 35 1/4" Female/female 38.1 mm (1.5") 234 mm (9.2") 1.2 kg (2.6 lbs)

GPU 70 1/4" Female/female 38.1 mm (1.5") 264 mm (10.4") 1.3 kg (2.9 lbs)

GPU 80 1/4" Female/female 38.1 mm (1.5") 277 mm (10.9") 1.3 kg (2.9 lbs)

GPU 100 1/4” Female/female N/A 234 mm (9.2") 1.3 kg (2.9 lbs)

GPU 200 1/4" Female/female 50.8 mm (2.0") 307 mm (12.1") 1.7 kg (3.7 lbs)

GPU 300 1/4" Female/female 50.8 mm (2.0") 358 mm (14.1") 1.8 kg (3.8 lbs)

GPU 300 (GC 300) 1/4" Female/male 83.8 mm (3.3") 401.3 mm (15.8") 2.3 kg (5.1 lbs)

GPU 500 1/4" Female/female 76.2 mm (3.0") 351 mm (13.8") 2.7 kg (6.0 lbs)

GPU 700 1/4" Female/female 76.2 mm (3.0") 404 mm (15.9") 4.4 kg (9.6 lbs)

GPU 2500 4R 1/4" Female/female 101.6 mm (4.0") 592 mm (23.3") 6.8 kg (15 lbs)

GPU 2500 8R 1/2" Female/female 101.6 mm (4.0") 714 mm (28.1") 8.0 kg (17.7 lbs)

GPU 3000 1/2" Female/female 101.6 mm (4.0") 777 mm (30.6") 8.5 kg (18.7 lbs)

GPU 5000 1/2" Female/female 101.6 mm (4.0") 1054 mm (41.5") 12.5 kg (27.6 lbs)

GPU 10M 8R 1/2" Female/male 152.4 mm (6.0") 970 mm (38.2") 22.5 kg (49.6 lbs)

GPU 10M 12R 3/4" Female/female 152.4 mm (6.0") 1125 mm (44.3") 24.9 kg (55.0 lbs)

GPU 13M 12R 3/4" Female/female 152.4 mm (6.0") 1270 mm (50.0") 28.1 kg (62.0 lbs)

GPU 13M 16R 1" Female/female 152.4 mm (6.0") 1308 mm (51.5") 29.5 kg (65.0 lbs)

GPU 17M 12R 3/4" Female/female 152.4 mm (6.0") 1461 mm (57.5") 32.7 kg (72.0 lbs)

GPU 17M 16R 1" Female/female 152.4 mm (6.0") 1499 mm (59.0") 34.0 kg (75.0 lbs)

GPU 20M 12R 3/4" Female/female 152.4 mm (6.0") 1666 mm (65.6") 37.2 kg (82.0 lbs)

GPU 20M 16R 1" Female/female 152.4 mm (6.0") 1705 mm (67.1") 38.6 kg (85.0 lbs)