The VLD series embodies the pursuit of simplicity and utility found in the KDseries.
The VLD series achieves simplification through the minimization of the number of critical parts.
◎ While maintaining the same degree of basic performance, material, and cleaning, the
VLD series realizes security and low cost through overall reduction of the number of
parts and changes to the review and processing methodology.
◎ Because the cleaning and inspection processes are the same as our conventional model, there is no change in reliability and durability.
◎ Achieves maximum particle performance for high-purity gases used in semiconductor by the highest-level manufacturing environment and polishing process

KD Manual diaphragm valves 1.96MPa
Diaphragm valve, low-pressure, manual
This diaphragm valve is a 1.96 MPa specification version of the KD Series. This high-quality diaphragm valve supports high-purity liquid materials for semiconductors.
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KD-Q Quarter-turn diaphragm valves
Diaphragm valve, low-pressure, manual
This is a 90° open/close diaphragm valve. Push-lock mechanisms can also be handled as an option.
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KD-QL LOTO diaphragm valves
Diaphragm valve, low-pressure, manual
With a special handle shape, this lockable diaphragm valve opens/closes at 90°, with safety measures (LOTO).
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KD-QT Quick Turn diaphragm valves
Diaphragm valve, low-pressure, manual
This safety valve opens/closes at 90°, preventing forgotten closing with a spring open/close mechanism.
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KD-HK 400℃ Manual valves, all metal
Diaphragm valve, low-pressure, manual
This all-metal diaphragm valve supports ambient temperatures up to 400°C.
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KD-A 200℃ Manual submersible valves
Diaphragm valve, low-pressure, manual
This diaphragm valve supports ambient temperatures up to 200°C. All the components, including the actuator, can be used in high-temperature environments, not just the gas-contacting parts.
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KD-S 200℃ Manual submersible valves
Diaphragm valve, low-pressure, manual
This PFA seat diaphragm valve has stable Cv values and supports ambient temperatures up to 200°C. All the components, including the actuator, can be used in high-temperature environments, not just the gas-contacting parts.
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TD-S 200℃ Manual submersible valves
Diaphragm valve, low-pressure, manual
This PFA seat diaphragm valve for integration has stable Cv values and supports ambient temperatures up to 200°C. All the components, including the actuator, can be used in high-temperature environments, not just the gas-contacting parts.
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VLD Manual diaphragm valves
Diaphragm valve, low-pressure, manual
This valve, based on the KD Series, retains performance, functions, and durability while reducing costs. This diaphragm valve supports high-purity gases for semiconductors.
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KCD Compact manual diaphragm valves
Diaphragm valve, low-pressure, manual
This valve is a compact version of the KD Series. This high-quality diaphragm valve supports high-purity gases for semiconductors.
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XD Manual diaphragm valves
Diaphragm valve, low-pressure, manual
This is a low-cost diaphragm valve for high-purity gas processes. Available for use in a wide range of fields, including semiconductors.
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TD Integrated Gas System-compatible Manual Valves
Diaphragm valve, low-pressure, manual
This diaphragm valve supports integrated 1.125" C-Seal.
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KD-K 250℃ Manual valves, all metal
Diaphragm valve, low-pressure, manual
This all-metal diaphragm valve supports ambient temperatures up to 250°C. All the components, including the actuator, can be used in high-temperature environments, not just the gas-contacting parts.
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KD-A 200℃ Manual submersible valves
Diaphragm valve, low-pressure, manual
This diaphragm valve supports ambient temperatures up to 200°C. All the components, including the actuator, can be used in high-temperature environments, not just the gas-contacting parts.
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KCD Compact manual diaphragm valves, 90 degree handle
Diaphragm valve, low-pressure, manual
This valve is a compact version of the KD Series. This high-quality diaphragm valve supports high-purity gases for semiconductors.
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WD Rebuildable manual valves 2.94MPa
Diaphragm valve, low-pressure, manual
This diaphragm valve, developed for liquid materials, has a replaceable seat and diaphragm.
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NDD Manual diaphragm valves 2.0MPa
Diaphragm valve, low-pressure, manual
This is a 2.0 MPa specification diaphragm valve. This high-quality diaphragm valve supports high-purity liquid materials for semiconductors.
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KD Manual diaphragm valves
Diaphragm valve, low-pressure, manual
This is the flagship model for low-pressure diaphragms. This diaphragm valve supports high-purity gases for semiconductors.
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ZCD Zero volume manual diaphragm valves
Diaphragm valve, low-pressure, manual
This diaphragm valve has minimized the internal dead volume.
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KD-E Rebuildable manual diaphragm valves
Diaphragm valve, low-pressure, manual
RSV (replaceable valve) This diaphragm valve is a version of the KD Series with replaceable seat and diaphragm.
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ZD-K 250℃ High-temperature Manual Replaceable diaphragm valves
Diaphragm valve, low-pressure, manual
This diaphragm valve can be used in high-temperature environments and the seats of which are structurally detachable and replaceable.